洁净室洁净度标准
■ 美国联邦标准（USAFederalStandard）209E（1992年）
洁净度级别 | 粒 径 |
0.1µm | 0.2µm | 0.3µm | 0.5µm | 5.0µm |
1 | 35.0 | 7.50 | 3.00 | 1.00 | NA |
10 | 350 | 75.0 | 30.0 | 10.0 | NA |
100 | NA | 750 | 300 | 100 | NA |
1000 | NA | NA | NA | 1000 | 7.0 |
10000 | NA | NA | NA | 10000 | 70.3 |
100000 | NA | NA | NA | 100000 | 700 |
■洁净室及洁净区空气洁净等级〔ISO14644-1]
ISO分级序数（N) | 大于或等于表中粒径的最大浓度限值（颗/m³空气） |
0.1µm | 0.2µm | 0.3µm | 0.5µm | 1µm | 5µm |
ISO Class1 | 10 | 2 | | | | |
ISO Class2 | 100 | 24 | 10 | 4 | | |
ISO Class3 | 1000 | 237 | 102 | 35 | 8 | |
ISO Class4 | 10000 | 2370 | 1020 | 352 | 83 | |
ISO Class5 | 100000 | 23700 | 10200 | 3520 | 832 | 29 |
ISO Class6 | 1000000 | 237000 | 102000 | 35200 | 8320 | 293 |
ISO Class7 | | | | 352000 | 83200 | 2930 |
ISO Class8 | | | | 3520000 | 832000 | 29300 |
ISO Class9 | | | | 35200000 | 8320000 | 293000 |
■ 基于≥0.5um粒径的各国洁净度等级近似对照表
个/M3≥0.5µm | ISO
14644-1(1999) | US
209E(1992) | US
209D(1988) | EEC
GGMP(1989) | FRANCE
AFNOR(1981) | GERMANY
VDI2083(1990) | JAPAN
JAOA(1989) |
1 | - | - | - | - | - | - | - |
3.5 | 2 | - | - | - | - | 0 | 2 |
10.0 | - | M1 | - | - | - | - | - |
35.3 | 3 | M1.5 | 1 | - | - | 1 | 3 |
100 | - | M2 | - | - | - | - | - |
353 | 4 | M2.5 | 10 | - | - | 2 | 4 |
1,000 | - | M3 | - | - | - | - | - |
3,530 | 5 | M3.5 | 100 | A+B | 4,000 | 3 | 5 |
10,000 | - | M4 | - | - | - | - | - |
35,300 | 6 | M4.5 | 1,000 | 1,000 | - | 4 | 6 |
100,000 | - | M5 | - | - | - | - | - |
353,000 | 7 | M5.5 | 10,000 | C | 400,000 | 5 | 7 |
1,000,000 | - | M6 | - | - | - | - | - |
3,530,000 | 8 | M6.5 | 100,000 | D | 4,000,000 | 6 | 8 |
10,000,000 | - | M7 | - | - | - | - | - |